Multilayer wiring substrate and method of manufacturing multilayer wiring substrate

A multilayer wiring substrate for providing a capacitor structure inside a multilayer wiring structure is disclosed. The multilayer wiring substrate includes a dielectric layer including a resin material mixed with an inorganic filler, wherein the inorganic filler is fabricated by mixing a paraelect...

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Bibliographic Details
Main Authors ROKUGAWA AKIO, YAMASAKI TOMOO, IIJIMA TAKAHIRO, SHIMIZU NORIYOSHI
Format Patent
LanguageEnglish
Published 17.11.2005
Edition7
Subjects
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Summary:A multilayer wiring substrate for providing a capacitor structure inside a multilayer wiring structure is disclosed. The multilayer wiring substrate includes a dielectric layer including a resin material mixed with an inorganic filler, wherein the inorganic filler is fabricated by mixing a paraelectric filler with an inorganic filler having a high dielectric constant.
Bibliography:Application Number: US20050128813