System for supply and delivery of high purity and ultrahigh purity carbon dioxide

A system for the supply and delivery of a high or a ultrahigh purity (UHP) carbon dioxide product stream to at least one process tool within a manufacturing facility and method comprising same is disclosed herein. In one embodiment, the system is comprised of the following sub-systems: a carbon diox...

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Bibliographic Details
Main Authors MATTIOLA PAUL A, CIRUCCI JOHN F, IVANKOVITS JOHN C, GERSHTEIN VLADIMIR Y
Format Patent
LanguageEnglish
Published 21.07.2005
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
BLASTING
CHEMISTRY
COMBINED HEATING AND REFRIGERATION SYSTEMS
COMPOUNDS THEREOF
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HEAT PUMP SYSTEMS
HEATING
INORGANIC CHEMISTRY
LIGHTING
LIQUEFACTION SOLIDIFICATION OF GASES
LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS
MANUFACTURE OR STORAGE OF ICE
MECHANICAL ENGINEERING
METALLURGY
MIXTURES BY PRESSURE AND COLD TREATMENT
NON-METALLIC ELEMENTS
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
REFRIGERATION OR COOLING
SEMICONDUCTOR DEVICES
SEPARATION
TRANSPORTING
WEAPONS
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Summary:A system for the supply and delivery of a high or a ultrahigh purity (UHP) carbon dioxide product stream to at least one process tool within a manufacturing facility and method comprising same is disclosed herein. In one embodiment, the system is comprised of the following sub-systems: a carbon dioxide source, a carbon dioxide delivery system, and the point of use (POU) containing at least one process tool.
Bibliography:Application Number: US20040760771