Active thermal control system with miniature liquid-cooled temperature control device for electronic device testing

• Main Authors: BEYERLE RICK, KABBANI SAMER, BACHELDER DON
• Format: Patent
• Language: English
• Published: 14.07.2005
• Edition: 7
• Subjects: MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

A temperature control system, which includes a miniature liquid-cooled heat sink, is used to provide a controlled temperature surface to an electronic device, such as a semiconductor device, during the testing or bum-in phase. In one embodiment, the system includes a miniature liquid-cooled heat sin...