BOND PAD SCHEME FOR CU PROCESS
A novel method of forming a bond pad of a semiconductor device and a novel bond pad structure. Two passivation layers are used to form bond pads of a semiconductor device. A portion of the second passivation layer resides between adjacent bond pads, preventing shorting of the bond pads during subseq...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English |
Published |
25.11.2004
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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