MICRO-ELECTROMECHANICAL INDUCTIVE SWITCH

A micro-electromechanical (MEM) switch capable of inductively coupling and decoupling electrical signals is described. The inductive MEM switch consists of a first plurality of coils on a moveable platform and a second plurality of coils on a stationary platform or substrate, the coils on the moveab...

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Bibliographic Details
Main Authors GROVES ROBERT A, VOLANT RICHARD P, FLORKEY JOHN E
Format Patent
LanguageEnglish
Published 26.08.2004
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
BASIC ELECTRONIC CIRCUITRY
ELECTRIC SWITCHES
ELECTRICITY
EMERGENCY PROTECTIVE DEVICES
INDUCTANCES
MAGNETS
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PULSE TECHNIQUE
RELAYS
SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
SELECTORS
TRANSFORMERS
TRANSPORTING
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Summary:A micro-electromechanical (MEM) switch capable of inductively coupling and decoupling electrical signals is described. The inductive MEM switch consists of a first plurality of coils on a moveable platform and a second plurality of coils on a stationary platform or substrate, the coils on the moveable platform being above or below those in the stationary substrate. Coupling and decoupling occurs by rotating or by laterally displacing the coils of the moveable platform with respect to the coils on the stationary substrate. Diverse arrangements of coils respectively on the moveable and stationary substrates allow for a multi-pole and multi-position switching configurations. The MEM switches described eliminate problems of stiction, arcing and welding of the switch contacts. The MEMS switches of the invention can be fabricated using standard CMOS techniques.
Bibliography:Application Number: US20030248876