Optical waveguide switch

A MEMS optical switch includes a movable cantilevered beam with a waveguide corresponding to one port of the switch. The beam is designed for in-plane motion and can be deflected, e.g., using a three-electrode motion actuator having one electrode on each side of the beam, which itself acts as the th...

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Bibliographic Details
Main Authors STUART HOWARD R, BAUMANN FRIEDER H
Format Patent
LanguageEnglish
Published 20.05.2004
Edition7
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Summary:A MEMS optical switch includes a movable cantilevered beam with a waveguide corresponding to one port of the switch. The beam is designed for in-plane motion and can be deflected, e.g., using a three-electrode motion actuator having one electrode on each side of the beam, which itself acts as the third electrode. The beam moves toward a side electrode in response to a voltage difference applied between the beam and that electrode. The beam has two terminal positions, each defined by a stopper. At each terminal position, a bumper portion of the beam is pushed against a corresponding stopper, which aligns the waveguide in the beam with one of two stationary waveguides, each corresponding to a port of the switch. The MEMS switch may be fabricated using a single silicon-on-insulator (SOI) wafer.
Bibliography:Application Number: US20020299132