Partitioned wafer boat for constant wafer backside emmissivity

A wafer boat including a partition which separates vertically adjacent wafer slots in the wafer boat and at least partially shields each wafer from the backside emissivity of the adjacently overlying wafer in order to form oxide layers of substantially uniform thickness on the wafers during thermal...

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Bibliographic Details
Main Authors LU CHING-SHAN, TWU JIHURNG, SUN HSUEH-LI, YOU WEI-MING, HUANG KUO-BIN, KUO CHUN-YI
Format Patent
LanguageEnglish
Published 04.03.2004
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A wafer boat including a partition which separates vertically adjacent wafer slots in the wafer boat and at least partially shields each wafer from the backside emissivity of the adjacently overlying wafer in order to form oxide layers of substantially uniform thickness on the wafers during thermal oxidation processing. Each of the partitions may be constructed of quartz. In another embodiment, each wafer is at least partially shielded from the backside emissivity of the adjacently overlying wafer by separating or partitioning the wafers using a bare or uncoated wafer.
Bibliography:Application Number: US20020235139