Resonator chip sensor for pressure and force with mechanically separate partial regions (slots) and a soft membrane

A sensor to reduce the loads due to different thermal expansions between a chip containing the sensing element, said chip preferably consisting of silicon, and the housing, typically made of steel, which can falsify the measuring results. The chip includes central and lateral fixations, which are me...

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Bibliographic Details
Main Authors CAVALLONI CLAUDIO, HAUEIS MARTIN, GNIELKA MARCO
Format Patent
LanguageEnglish
Published 22.01.2004
Edition7
Subjects
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
TESTING
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Summary:A sensor to reduce the loads due to different thermal expansions between a chip containing the sensing element, said chip preferably consisting of silicon, and the housing, typically made of steel, which can falsify the measuring results. The chip includes central and lateral fixations, which are mechanically decoupled from each other and are arranged on that end of the sensing element where the force application occurs.
Bibliography:Application Number: US20030416369