Thin film piezoelectric element and its manufacturing method, and actuator using the same

An actuator comprises first and second structures each with a piezoelectric layer sandwiched between a main electrode layer and an opposed electrode layer, which structures are formed on two substrates, respectively. A first main electrode layer and a first opposed electrode layer are provided with...

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Bibliographic Details
Main Author UCHIYAMA HIROKAZU
Format Patent
LanguageEnglish
Published 04.12.2003
Edition7
Subjects
ELECTRICITY
INFORMATION STORAGE
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER
PHYSICS
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Summary:An actuator comprises first and second structures each with a piezoelectric layer sandwiched between a main electrode layer and an opposed electrode layer, which structures are formed on two substrates, respectively. A first main electrode layer and a first opposed electrode layer are provided with layer two projections, and a second opposed electrode layer is provided with one layer projection. Connection wiring is arranged for establishing connection, with the above two structures bonded to each other, between the layer projection of the first main electrode layer and the second main electrode layer, and between the layer projection of the first opposed electrode layer and the layer projection of the second opposed electrode layer. Thus, it is possible to provide an actuator which may assure highly accurate position control.
Bibliography:Application Number: US20030387378