Data brokering system for integrated remote tool access, data collection, and control

A data brokering system for semiconductor wafer data is presented that comprises: a FAB having at least one automated semiconductor wafer manufacturing tool; a plurality of OEMs, coupled to the FAB via a secure service net; means for providing data about a semiconductor wafer manufactured by the too...

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Bibliographic Details
Main Authors BARBOZA SUNIL, WUSSOW WENDY, PERRY STUART
Format Patent
LanguageEnglish
Published 06.11.2003
Edition7
Subjects
CALCULATING
COMPUTING
CONTROL OR REGULATING SYSTEMS IN GENERAL
CONTROLLING
COUNTING
DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FORADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORYOR FORECASTING PURPOSES
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
FUNCTIONAL ELEMENTS OF SUCH SYSTEMS
MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS
PHYSICS
REGULATING
SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE,COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTINGPURPOSES, NOT OTHERWISE PROVIDED FOR
TELEPHONIC COMMUNICATION
TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHICCOMMUNICATION
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Summary:A data brokering system for semiconductor wafer data is presented that comprises: a FAB having at least one automated semiconductor wafer manufacturing tool; a plurality of OEMs, coupled to the FAB via a secure service net; means for providing data about a semiconductor wafer manufactured by the tool to one of the OEMs without revealing information about the tool; and means for collecting fees based on characteristics of the provided data.
Bibliography:Application Number: US20030385441