Pressure sensor with a corrosion-resistant diaphragm

A pressure sensor includes a sensor device and a diaphragm. The diaphragm is exposed to a fluid, a pressure relative to which is detected using the sensor device. The diaphragm is made of a material having a pitting index, which is defined by the equation, (Cr+3.3Mo+20N), of 50 or greater and Ni con...

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Bibliographic Details
Main Authors NOMURA HIROSHI, BABA HIRONOBU, KATO YUKIHIRO, KOIKE HARUHISA
Format Patent
LanguageEnglish
Published 30.10.2003
Edition7
Subjects
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Summary:A pressure sensor includes a sensor device and a diaphragm. The diaphragm is exposed to a fluid, a pressure relative to which is detected using the sensor device. The diaphragm is made of a material having a pitting index, which is defined by the equation, (Cr+3.3Mo+20N), of 50 or greater and Ni content of 30 weight % or greater to prevent the diaphragm from corroding due to the fluid.
Bibliography:Application Number: US20030419224