Polishing head with a floating knife-edge
A polishing head with a floating knife-edge mechanism includes a base, a retaining ring secured to the base defining a pocket area beneath the base, and a lower assembly floating within the pocket area via a diaphragm seal. The lower assembly includes a disk-shaped support plate having a plurality o...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
25.09.2003
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | A polishing head with a floating knife-edge mechanism includes a base, a retaining ring secured to the base defining a pocket area beneath the base, and a lower assembly floating within the pocket area via a diaphragm seal. The lower assembly includes a disk-shaped support plate having a plurality of apertures distributed in a center region of the support plate, a clamp ring used to secure the diaphragm seal along a rim region of the support plate, and the floating knife-edge mechanism positioned between the rim region and the center region of the support plate. |
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Bibliography: | Application Number: US20020063127 |