Sensor chip with additional heating element, method for preventing a sensor chip from being soiled, and use of an additional heating element on a sensor chip

In the case of a sensor chip according to the related art, impurities in a flowing medium may be deposited in the area of a sensor area and may permanently soil it, resulting in a negative effect on the measurement response of the membrane. In the case of the novel sensor chip (1), an additional hea...

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Bibliographic Details
Main Authors SCHULZ TORSTEN, KONZELMANN UWE, HECHT HANS
Format Patent
LanguageEnglish
Published 21.08.2003
Edition7
Subjects
MEASURING
MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL
METERING BY VOLUME
PHYSICS
TESTING
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Summary:In the case of a sensor chip according to the related art, impurities in a flowing medium may be deposited in the area of a sensor area and may permanently soil it, resulting in a negative effect on the measurement response of the membrane. In the case of the novel sensor chip (1), an additional heater (39) is situated upstream and at a definite distance from the sensor area, resulting in the impurities in the flowing medium being deposited in the area of the additional heater (39), i.e., in their being unable to reach the sensor area (17).
Bibliography:Application Number: US20030276183