Method for fabricating high aspect ratio electrodes
In a method for building high aspect ratio electrodes in an electrode means (E) comprising parallel electrodes (epsi1,epsi2) in a dense arrangement, the electrodes are built in a repeatedly performed sequence of successive process steps involving the use of only one and the same photomask in every p...
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Main Author | |
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Format | Patent |
Language | English |
Published |
17.07.2003
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | In a method for building high aspect ratio electrodes in an electrode means (E) comprising parallel electrodes (epsi1,epsi2) in a dense arrangement, the electrodes are built in a repeatedly performed sequence of successive process steps involving the use of only one and the same photomask in every patterning step, the electrodes being formed with a desired aspect ratio according to the number of times the sequence is repeated, and top surface of the electrode means planarized in a final process step. |
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Bibliography: | Application Number: US20020300801 |