On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoring

An on-line halogen analyzer system and method of use for semiconductor processing effluent monitoring. The system includes sampling the effluent stream into an absorption cell, and passing UV-Visible light through the effluent sample in the cell. After passing through the sample the light is collect...

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Bibliographic Details
Main Authors RIDGEWAY ROBERT GORDON, ROGERS STEVEN ARTHUR, MAROULIS PETER JAMES, JI BING, WITHERS, HOWARD PAULE, KARWACKI, EUGENE JOSEPH, LANGAN JOHN GILES
Format Patent
LanguageEnglish
Published 29.05.2003
Edition7
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:An on-line halogen analyzer system and method of use for semiconductor processing effluent monitoring. The system includes sampling the effluent stream into an absorption cell, and passing UV-Visible light through the effluent sample in the cell. After passing through the sample the light is collected by a photo detector for real-time wavelength-selective absorption analysis. The system provides simultaneous determination of the concentrations of multiple halogen gases (e.g. F2, Cl2, Br2, and I2) in semiconductor processing effluent streams. The invention can be used for chemical vapor deposition (CVD) chamber cleaning endpoint determination and to improve fluorine utilization efficiency in remote plasma downstream CVD chamber cleaning processes.
Bibliography:Application Number: US20010003223