Method of altering and preserving the surface properties of a polishing pad and specific applications therefor
The present invention is directed, in general, to an improved material and method of planarizing a surface on a semiconductor wafer and, more specifically, to a method of altering the properties of polymers, preferably thermoplastic foam polymers, used in polishing applications. The chemical and mec...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
20.02.2003
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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Summary: | The present invention is directed, in general, to an improved material and method of planarizing a surface on a semiconductor wafer and, more specifically, to a method of altering the properties of polymers, preferably thermoplastic foam polymers, used in polishing applications. The chemical and mechanical properties thermoplastic foam substrates can be transformed by inorganic, inorganic-organic, and or organic-organic grafting techniques, such that the polymer foam is endowed with new set of properties that more desirable and suitable for polishing. |
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Bibliography: | Application Number: US20020218869 |