Electrostatically actuated microswitch

The present invention is directed to a micro electromechanical system (MEMS) relay having a movable actuator member part that moves laterally in a wafer surface recess into contact with a power terminal. In a preferred embodiment, the movable actuator member is a planar single body comprised of two...

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Bibliographic Details
Main Author ROBERTSON JANET K
Format Patent
LanguageEnglish
Published 19.12.2002
Edition7
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SWITCHES
ELECTRICITY
EMERGENCY PROTECTIVE DEVICES
RELAYS
SELECTORS
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Summary:The present invention is directed to a micro electromechanical system (MEMS) relay having a movable actuator member part that moves laterally in a wafer surface recess into contact with a power terminal. In a preferred embodiment, the movable actuator member is a planar single body comprised of two flat intersecting flexible "S" shaped portions when seen in plan view. A power terminal makes contact with the middle part of one "S", where it intersects with the other "S". A pair of electrostatic electrodes are located at each end of the one "S", to respectively move the middle part of that "S" into and away from contact with a power terminal in the recess. The other "S" serves as a flexible connection to the middle part of the other "S". Means are provided to electrically isolate the ends of the first "S from its middle part.
Bibliography:Application Number: US20010876409