Condenser optical system and illumination optical apparatus provided with the optical system

A condenser optical system obtains a predetermined, desired optical characteristic in a simple structure having a small number of lenses. A condenser optical system having an entrance focal plane and an exit focal plane, and that forms an image at the exit focal plane of an object located at the ent...

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Bibliographic Details
Main Authors KUMAZAWA MASATO, SUENAGA YUTAKA, HIRAGA KOUICHI
Format Patent
LanguageEnglish
Published 21.11.2002
Edition7
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:A condenser optical system obtains a predetermined, desired optical characteristic in a simple structure having a small number of lenses. A condenser optical system having an entrance focal plane and an exit focal plane, and that forms an image at the exit focal plane of an object located at the entrance focal plane, includes in order from an object side, a first lens group having a negative lens having a concave surface that faces the object side, a second lens group having a positive lens, and a third lens group. The first lens group has at least one aspherical lens surface.
Bibliography:Application Number: US20010012514