METHOD OF MANUFACTURING A POLISHING PAD USING A BEAM

The present invention provides a method of manufacturing a polishing pad using a beam, and a system incorporating the method. In one embodiment, the method includes providing a cake that is susceptible to beam ablation, and skiving a polishing pad from the cake using a beam apparatus configured to p...

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Bibliographic Details
Main Authors MICELI FRANK, EASTER WILLIAM G, CREVASSE ANNETTE M
Format Patent
LanguageEnglish
Published 10.10.2002
Edition7
Subjects
CLADDING OR PLATING BY SOLDERING OR WELDING
CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING
DRESSING OR CONDITIONING OF ABRADING SURFACES
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINE TOOLS
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
METAL-WORKING NOT OTHERWISE PROVIDED FOR
PERFORMING OPERATIONS
POLISHING
SOLDERING OR UNSOLDERING
TOOLS FOR GRINDING, BUFFING, OR SHARPENING
TRANSPORTING
WELDING
WORKING BY LASER BEAM
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Summary:The present invention provides a method of manufacturing a polishing pad using a beam, and a system incorporating the method. In one embodiment, the method includes providing a cake that is susceptible to beam ablation, and skiving a polishing pad from the cake using a beam apparatus configured to produce a beam.
Bibliography:Application Number: US20010785636