SiC jig for use in heat treatment

There is provided a jig for use in heat treatment onto which a vitreous plate having had films exhibiting respective given functions formed on its surface is to be loaded when the vitreous plate undergoes heat treatment. The jig contains 50% by weight or more phase containing SiC, its thermal conduc...

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Bibliographic Details
Main Authors OGURA SHIGERU, KINOSHITA TOSHIHARU
Format Patent
LanguageEnglish
Published 20.06.2002
Edition7
Subjects
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Summary:There is provided a jig for use in heat treatment onto which a vitreous plate having had films exhibiting respective given functions formed on its surface is to be loaded when the vitreous plate undergoes heat treatment. The jig contains 50% by weight or more phase containing SiC, its thermal conductivity is 10 W/mK or more, its apparent porosity 0.2 to 25%, and in that its coefficient of thermal expansion is 3.8x10-6/°C. to 5.5x10-6/°C.
Bibliography:Application Number: US20010984366