Object positioning method for a lithographic projection apparatus

A method for placement of a object such as a substrate or a mask on a table, said method including: a first placement step in which the object is placed on a first position on the table; a measuring step in which a displacement between the first position of the object and the required position of th...

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Bibliographic Details
Main Authors ARIENS ANDREAS B.G, WILLEMS VAN DIJK MARCUS J.H, CASTENMILLER THOMAS J.M, VAN DE PASCH ENGELBERTUS A.F
Format Patent
LanguageEnglish
Published 16.08.2001
Edition7
Subjects
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Summary:A method for placement of a object such as a substrate or a mask on a table, said method including: a first placement step in which the object is placed on a first position on the table; a measuring step in which a displacement between the first position of the object and the required position of the object is determined; a removing step in which the object is released and removed from the table; a moving step in which the object and the table are moved relatively to each other by substantially the said displacement, in a direction substantially parallel to the surface of the table; and a second placement step in which the object is placed at the required position on the table.
Bibliography:Application Number: US20010777460