Optical measurement apparatus and optical measurement method

An optical measurement apparatus including: an irradiation optical system configured to irradiate a measurement subject with irradiation light that includes a plurality of wavelengths; a reception optical system configured to receive measurement light that is transmission light or reflection light t...

Full description

Saved in:
Bibliographic Details
Main Authors Irie, Suguru, Taguchi, Kunikazu
Format Patent
LanguageEnglish
Published 08.10.2024
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
TESTING
Online AccessGet full text

Cover

More Information
Summary:An optical measurement apparatus including: an irradiation optical system configured to irradiate a measurement subject with irradiation light that includes a plurality of wavelengths; a reception optical system configured to receive measurement light that is transmission light or reflection light travelling from the measurement subject as a result of the measurement subject being irradiated with the irradiation light; and a polarizing plate, wherein the polarizing plate is configured to be able to be provided in either the irradiation optical system or the reception optical system.
Bibliography:Application Number: US202017119216