Control of liquid delivery in auto-refill systems

An system, method and software for controlling processes of an auto-refill system of an ampoule including one or more sensors configured to determine one or more liquid level heights within the ampoule. The auto-refill system having a state machine configured to control the auto-refill system, the s...

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Main Authors Razavi Hesabi, Zohreh, Trinh, Cong, Sawalkar, Saloni, Griffin, Kevin, Maldonado-Garcia, Maribel, Chaney, Kendrick H, Choi, Kenric, Jose, Vipin, Garachtchenko, Alexander V
Format Patent
LanguageEnglish
Published 10.09.2024
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Summary:An system, method and software for controlling processes of an auto-refill system of an ampoule including one or more sensors configured to determine one or more liquid level heights within the ampoule. The auto-refill system having a state machine configured to control the auto-refill system, the state machine having one or more states for refilling the ampoule.
Bibliography:Application Number: US202117189963