Semiconductor memory device

• Main Authors: Kim, Hyunyong, Um, Minsub, Rhee, Joonkyu, Choi, Yoonyoung, Ahn, Jiyoung, We, Ju Hyung, Ahn, Yongseok
• Format: Patent
• Language: English
• Published: 23.07.2024
• Subjects: ELECTRICITY

A semiconductor memory device includes a substrate including a device isolation pattern defining an active pattern extending in a first direction and including first and second source/drain regions, a word line extending in a second direction intersecting the first direction, a bit line that is on the word line and electrically connected to the first source/drain region and that extends in a third direction that intersects the first and second directions, a bit-line spacer on a sidewall of the bit line, a storage node contact electrically connected to the second source/drain region and spaced apart from the bit line across the bit-line spacer, and a dielectric pattern between the bit-line spacer and the storage node contact. The bit-line spacer includes a first spacer covering the sidewall of the bit line and a second spacer between the dielectric pattern and the first spacer.