Etch stop and protection layer for capacitor processing in electroacoustic devices

• Main Authors: Eggs, Christoph, Telgmann, Thomas, Lukashov, Ilya, Esquius Morote, Marc, Giesen, Marcel, Jungkunz, Matthias, Pohlner, Stephan, Freisleben, Stefan
• Format: Patent
• Language: English
• Published: 23.07.2024
• Subjects: DEAF-AID SETS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS; PUBLIC ADDRESS SYSTEMS

Electroacoustic devices with a capacitive element and methods for fabricating such electroacoustic devices. An example method includes forming an acoustic device above a first region of a substrate, and forming a capacitive element above a second region of the substrate and adjacent to the acoustic device. The forming of the capacitive element may include forming a protective layer above the substrate where a first portion of the protective layer is above the second region of the substrate and a second portion of the protective layer is above the first region of the substrate, forming a dielectric region above the protective layer, and forming an electrode above the dielectric region. The dielectric region may include a different material than the protective layer.