Air pocket structures for promoting total internal reflection in a waveguide

Recesses are formed on a front side and a rear side of a waveguide. A solid porogen material is spun onto the front side and the rear side and fills the recesses. First front and rear cap layers are then formed on raised formations of the waveguide and on the solid porogen material. The entire struc...

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Bibliographic Details
Main Authors Singh, Vikramjit, Luo, Kang, Deng, Xiaopei, Pi, Nai-Wen, Yang, Shuqiang, Xu, Frank Y
Format Patent
LanguageEnglish
Published 23.07.2024
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Summary:Recesses are formed on a front side and a rear side of a waveguide. A solid porogen material is spun onto the front side and the rear side and fills the recesses. First front and rear cap layers are then formed on raised formations of the waveguide and on the solid porogen material. The entire structure is then heated and the solid porogen material decomposes to a porogen gas. The first front and rear cap layers are porous to allow the porogen gas to escape and air to enter into the recesses. The air maximizes a difference in refractive indices between the high-index transparent material of the waveguide and the air to promote reflection in the waveguide from interfaces between the waveguide and the air.
Bibliography:Application Number: US201917416248