Display panel patterning device

A patterning device performs patterning in manufacture of a display panel in which thin films including an organic film are laminated above a substrate. The patterning device includes a chamber, light transmissive plates, and a laser emitter. The chamber has a light transmissive window including a f...

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Bibliographic Details
Main Authors Yamaguchi, Jun, Shinokawa, Yasuharu, Nendai, Kenichi, Yada, Shuhei
Format Patent
LanguageEnglish
Published 16.07.2024
Subjects
CLADDING OR PLATING BY SOLDERING OR WELDING
CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING
ELECTRICITY
MACHINE TOOLS
METAL-WORKING NOT OTHERWISE PROVIDED FOR
PERFORMING OPERATIONS
SOLDERING OR UNSOLDERING
TRANSPORTING
WELDING
WORKING BY LASER BEAM
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Summary:A patterning device performs patterning in manufacture of a display panel in which thin films including an organic film are laminated above a substrate. The patterning device includes a chamber, light transmissive plates, and a laser emitter. The chamber has a light transmissive window including a first light transmissive plate through which a laser beam is transmitted and accommodates a thin film laminated substrate. A second light transmissive plate through which the laser beam is transmitted is in the chamber between the first light transmissive plate and the thin film laminated substrate at a position spaced away from the thin film laminated substrate. The laser emitter is outside the chamber and emits the laser beam towards the thin film laminated substrate, through the first light transmissive plate and the second light transmissive plate, to irradiate and remove a portion of the thin film.
Bibliography:Application Number: US201916452530