Ingot puller apparatus having a flange that extends from the funnel or from the silicon feed tube
Methods for growing single crystal silicon ingots that involve silicon feed tube inert gas control are disclosed. Ingot puller apparatus that include a flange that extends radially from a silicon funnel or from a silicon feed tube to reduce backflow of gases from the silicon feed tube into the growt...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
16.07.2024
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Subjects | |
Online Access | Get full text |
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Summary: | Methods for growing single crystal silicon ingots that involve silicon feed tube inert gas control are disclosed. Ingot puller apparatus that include a flange that extends radially from a silicon funnel or from a silicon feed tube to reduce backflow of gases from the silicon feed tube into the growth chamber are also disclosed. |
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Bibliography: | Application Number: US202217570146 |