High-brightness laser produced plasma source and method of generation and collection radiation

• Main Authors: Khristoforov, Oleg Borisovich, Glushkov, Denis Aleksandrovich, Koshelev, Konstantin Nikolaevich, Ellwi, Samir, Ivanov, Vladimir Vitalievich, Medvedev, Vyacheslav Valerievich, Vinokhodov, Aleksandr Yurievich, Krivtsun, Vladimir Mikhailovich, Krivokorytov, Mikhail Sergeyevich, Lash, Aleksandr Andreevich
• Format: Patent
• Language: English
• Published: 02.07.2024
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; X-RAY TECHNIQUE

A laser produced plasma light source comprises a vacuum chamber with a rotating target assembly supplying a target into an interaction zone with focused laser beam. The target is layer of a fluid and/or free-flowing target material on a surface of annular groove in the rotating target assembly. An output beam of short-wavelength radiation exits the interaction zone to an optical collector through the means for debris mitigation. A linear velocity of the target is not less than 100 m/s and a vector of the linear velocity of the target in the interaction zone is directed on one side of a plane passing through the interaction zone and the rotation axis while the focused laser beam and the output beam are located on another side of said plane. The optical collector comprises two ellipsoidal mirror units arranged in a tandem.