Gas distribution system and reactor system including same
A gas distribution system, a reactor system including the gas distribution system, and method of using the gas distribution system and reactor system are disclosed. The gas distribution system can be used in gas-phase reactor systems to independently monitor and control gas flow rates in a plurality...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
02.07.2024
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Subjects | |
Online Access | Get full text |
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Summary: | A gas distribution system, a reactor system including the gas distribution system, and method of using the gas distribution system and reactor system are disclosed. The gas distribution system can be used in gas-phase reactor systems to independently monitor and control gas flow rates in a plurality of channels of a gas distribution system coupled to a reaction chamber. |
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Bibliography: | Application Number: US202318207322 |