Semiconductor memory device

A semiconductor memory device includes a conducting layer and an insulating layer that are disposed above a semiconductor substrate, a plurality of pillars that extend in a direction which crosses a surface of the semiconductor substrate, and a plate that is disposed between the plurality of pillars...

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Bibliographic Details
Main Authors Minami, Toshifumi, Baba, Yasuyuki, Yonehama, Keisuke, Sato, Atsuhiro, Shinohara, Hiroshi, Higashitsuji, Teppei, Kamata, Hideyuki
Format Patent
LanguageEnglish
Published 25.06.2024
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A semiconductor memory device includes a conducting layer and an insulating layer that are disposed above a semiconductor substrate, a plurality of pillars that extend in a direction which crosses a surface of the semiconductor substrate, and a plate that is disposed between the plurality of pillars and extends in the same direction as the pillars. A surface of the plate, which faces the pillars, has convex portions and non-convex portions.
Bibliography:Application Number: US202318176656