Transversely-excited film bulk acoustic resonators with electrodes having irregular hexagon cross-sectional shapes

Acoustic resonators and filter devices, and method of making acoustic resonators and filter devices. An acoustic resonator includes a substrate having a surface and a piezoelectric plate having front and back surfaces, the back surface attached to the surface of the substrate except for a portion of...

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Bibliographic Details
Main Authors Koskela, Julius, Plesski, Viktor
Format Patent
LanguageEnglish
Published 11.06.2024
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Summary:Acoustic resonators and filter devices, and method of making acoustic resonators and filter devices. An acoustic resonator includes a substrate having a surface and a piezoelectric plate having front and back surfaces, the back surface attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The interleaved fingers have an irregular hexagon cross-sectional shape.
Bibliography:Application Number: US202117242062