Wide-base magnetic tunnel junction device with sidewall polymer spacer

• Main Authors: Marchack, Nathan P, Hashemi, Pouya, Kothandaraman, Chandrasekharan
• Format: Patent
• Language: English
• Published: 07.05.2024
• Subjects: ELECTRICITY

A semiconductor device including a second magnetic tunnel junction stack aligned above a spin conductor layer above a first magnetic junction stack, a sidewall dielectric surrounding the second magnetic tunnel junction stack, a vertical side surface of the sidewall dielectric is aligned with vertical side surfaces of the spin conductor layer and the first magnetic junction stack. A method including forming a first magnetic tunnel junction stack, a spin conductor layer and a second magnetic tunnel junction stack, patterning the second magnetic tunnel junction stack, while not patterning the spin conductor layer and the first magnetic tunnel junction stack, forming a sidewall dielectric and a polymer layer on the sidewall dielectric. A method including patterning a second magnetic tunnel junction stack, while not patterning a spin conductor layer below the second magnetic tunnel junction stack nor a first magnetic tunnel junction stack below the spin conductor layer.