Method and computer program product for OCT measurement beam adjustment

• Main Authors: Stambke, Martin, Hermani, Jan-Patrick, Notheis, Thomas, Sauter, Alexander
• Format: Patent
• Language: English
• Published: 09.04.2024
• Subjects: CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; MACHINE TOOLS; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; PHYSICS; SOLDERING OR UNSOLDERING; TESTING; TRANSPORTING; WELDING; WORKING BY LASER BEAM

A method determines translational and/or rotational deviations between the measurement coordinate system of a measurement mirror scanner and the processing coordinate system of a processing mirror scanner. A measurement beam reflected at a workpiece returns on a path of an incident measurement beam and is captured by a spatially resolving measurement sensor to ascertain spatially resolving information of the workpiece. The reflected measurement beam, in a sensor image of the measurement sensor, is imaged onto a previously known image position. This is accomplished by ascertaining a focal position deviation of the processing beam by scanning with the processing beam, evaluating a laser power detected at grid points, fixing the processing mirror scanner, capturing spatially resolving height information of the pinhole diaphragm by the measurement sensor, and determining a translational deviation between the processing and measurement coordinate systems based on the deviation.