Memory device
According to one embodiment, a memory device includes a substrate; a structure including a plurality of conductive layers stacked on the substrate; and a pillar arranged inside the structure and including a semiconductor layer that extends in a direction perpendicular to a surface of the substrate....
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
02.04.2024
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Subjects | |
Online Access | Get full text |
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Abstract | According to one embodiment, a memory device includes a substrate; a structure including a plurality of conductive layers stacked on the substrate; and a pillar arranged inside the structure and including a semiconductor layer that extends in a direction perpendicular to a surface of the substrate. The semiconductor layer includes a first portion on a side of an upper portion of the structure, and a second portion between the first portion and the substrate. The first portion has a thickness larger than a thickness of the second portion. |
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AbstractList | According to one embodiment, a memory device includes a substrate; a structure including a plurality of conductive layers stacked on the substrate; and a pillar arranged inside the structure and including a semiconductor layer that extends in a direction perpendicular to a surface of the substrate. The semiconductor layer includes a first portion on a side of an upper portion of the structure, and a second portion between the first portion and the substrate. The first portion has a thickness larger than a thickness of the second portion. |
Author | Oshima, Yasunori Uchimura, Yasuhiro Hamada, Tatsufumi Sotome, Shinichi Arisumi, Osamu Kuki, Tomohiro |
Author_xml | – fullname: Hamada, Tatsufumi – fullname: Kuki, Tomohiro – fullname: Sotome, Shinichi – fullname: Oshima, Yasunori – fullname: Uchimura, Yasuhiro – fullname: Arisumi, Osamu |
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Notes | Application Number: US202017106667 |
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Snippet | According to one embodiment, a memory device includes a substrate; a structure including a plurality of conductive layers stacked on the substrate; and a... |
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SubjectTerms | ELECTRICITY INFORMATION STORAGE PHYSICS STATIC STORES |
Title | Memory device |
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