Multifunction magnetic and piezoresistive MEMS pressure sensor

Aspects of the subject disclosure include a pressure-sensing device consisting of a housing including a membrane and one or more piezoresistive elements disposed on the membrane to sense a displacement due to a deflection of the membrane. A first set of electrodes is disposed over the membrane, and...

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Bibliographic Details
Main Authors Khan, Majid, Ribeiro, Roberto M, Gider, Savas
Format Patent
LanguageEnglish
Published 19.03.2024
Subjects
ANALOGOUS ARRANGEMENTS USING OTHER WAVES
DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES
ELECTRICITY
LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION ORRERADIATION OF RADIO WAVES
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
RADIO DIRECTION-FINDING
RADIO NAVIGATION
TESTING
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Summary:Aspects of the subject disclosure include a pressure-sensing device consisting of a housing including a membrane and one or more piezoresistive elements disposed on the membrane to sense a displacement due to a deflection of the membrane. A first set of electrodes is disposed over the membrane, and a second set of electrodes is disposed on a permeable port of the device at a distance from the membrane. The first and second sets of electrodes form an electrostatic actuator to exert a repulsive force onto the membrane to reduce the deflection of the membrane.
Bibliography:Application Number: US202318109180