Heat dissipation system with microelectromechanical system (MEMS) for cooling electronic or photonic components
In one or more embodiments, an apparatus includes a substrate and die package, a thermal transfer plate positioned adjacent to the substrate and die package for cooling the substrate and die package, wherein at least one electrical path extends through the thermal transfer plate for transmitting pow...
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Main Author | |
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Format | Patent |
Language | English |
Published |
20.02.2024
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Subjects | |
Online Access | Get full text |
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Summary: | In one or more embodiments, an apparatus includes a substrate and die package, a thermal transfer plate positioned adjacent to the substrate and die package for cooling the substrate and die package, wherein at least one electrical path extends through the thermal transfer plate for transmitting power from a power module to the substrate and die package, and a microelectromechanical system (MEMS) module comprising a plurality of air movement cells for dissipating heat from the thermal transfer plate. |
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Bibliography: | Application Number: US202017083152 |