Semiconductor structure and method for forming the same

• Main Authors: Tung, Yu-Cheng, Lee, Fu-Che, Liu, An-Chi, Jhan, Yi-Wang, Yan, Yifei, Lin, Gang-Yi
• Format: Patent
• Language: English
• Published: 13.02.2024
• Subjects: ELECTRICITY

A semiconductor structure includes a substrate comprising a peripheral region and a memory region defined thereon, a first dielectric layer disposed on the substrate, a second dielectric layer disposed on the first dielectric layer, an opening on the peripheral region of the substrate and having a l...