High reliability varifocal electrostatic lens
A varifocal lens includes a substrate having an inclined region, a primary electrode disposed over the inclined region of the substrate, a dielectric layer disposed over the primary electrode, a deformable membrane disposed over and at least partially spaced away from the dielectric layer, a seconda...
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Main Authors | , , , , , , , , , |
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Format | Patent |
Language | English |
Published |
09.01.2024
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Subjects | |
Online Access | Get full text |
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Summary: | A varifocal lens includes a substrate having an inclined region, a primary electrode disposed over the inclined region of the substrate, a dielectric layer disposed over the primary electrode, a deformable membrane disposed over and at least partially spaced away from the dielectric layer, a secondary electrode disposed over a surface of the deformable membrane facing toward or away from the dielectric layer and overlying at least a portion of the primary electrode, and a fluid between the membrane and the substrate, wherein a surface of the dielectric layer facing the secondary electrode comprises a textured surface. |
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Bibliography: | Application Number: US202017014336 |