Method and system for improving the operation of semiconductor processing

The present disclosure is directed to a system and method to identify and track parts of a semiconductor processing chamber, as well as the status of the parts, and store status information in a centralized location as status changes over time.

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Bibliographic Details
Main Authors Chen, Chun-Chung, Yang, Hsui, Shanbhag, Jeevan, Salimian, Siamak, Liao, Chien-Min, Ganon, David, Hunter, Earl, Luigi, Mariana, Yang, Yao-Hung, Cho, Tom K
Format Patent
LanguageEnglish
Published 26.12.2023
Subjects
BASIC ELECTRIC ELEMENTS
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
PRINTED CIRCUITS
SEMICONDUCTOR DEVICES
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Summary:The present disclosure is directed to a system and method to identify and track parts of a semiconductor processing chamber, as well as the status of the parts, and store status information in a centralized location as status changes over time.
Bibliography:Application Number: US201916702031