Process kit ring adaptor

A process kit ring adaptor includes one or more upper surfaces and one or more lower surfaces. The one or more upper surfaces are configured to support a process kit ring. The one or more lower surfaces are configured to interface with an end effector. The process kit ring adaptor supporting the pro...

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Bibliographic Details
Main Authors Hudgens, Jeffrey, Kopec, Nicholas Michael, Koosau, Denis Martin, Lee, Helder, Babayan, Steven, Cox, Damon K, Volfovski, Leon, Schmid, Andreas, McAllister, Douglas R
Format Patent
LanguageEnglish
Published 12.12.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:A process kit ring adaptor includes one or more upper surfaces and one or more lower surfaces. The one or more upper surfaces are configured to support a process kit ring. The one or more lower surfaces are configured to interface with an end effector. The process kit ring adaptor supporting the process kit ring is configured to be transported on the end effector within a processing system.
Bibliography:Application Number: US202117216439