RF switch device

Disclosed is an RF switch device and, more particularly, an RF switch device having an air gap over a gate electrode and a metal interconnect at a position higher than the air gap and that at least partially overlap the air gap in the vertical direction, thereby preventing exposure of an upper porti...

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Bibliographic Details
Main Authors Kim, Hae Taek, Eom, Seung Hyun, Koo, Ja Geon, Jung, Jin Hyo, Lim, Ki Won, Lee, Sang Yong, Lee, Hyun Joong
Format Patent
LanguageEnglish
Published 28.11.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:Disclosed is an RF switch device and, more particularly, an RF switch device having an air gap over a gate electrode and a metal interconnect at a position higher than the air gap and that at least partially overlap the air gap in the vertical direction, thereby preventing exposure of an upper portion of the air gap in subsequent processing.
Bibliography:Application Number: US202217718055