Short-circuit probe card, wafer test system, and fault detection method for the wafer test system

The present invention provides a short-circuit probe card, including: a substrate having an upper surface and a lower surface; a plurality of first contacts formed on the upper surface; and a plurality of second contacts formed on the lower surface and connected to the plurality of first contacts. T...

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Bibliographic Details
Main Authors Kan, Chung-Hsuan, Chen, Yih-Chau, Ho, Hsuan-Min, Tsai, Yuan-Long, Lin, Shu-Chi
Format Patent
LanguageEnglish
Published 21.11.2023
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:The present invention provides a short-circuit probe card, including: a substrate having an upper surface and a lower surface; a plurality of first contacts formed on the upper surface; and a plurality of second contacts formed on the lower surface and connected to the plurality of first contacts. The first contacts and second contacts are all grounded.
Bibliography:Application Number: US202016912021