Multiple laser beam processing

Described herein is a system for processing a workpiece that includes a plurality of lasers that each produces a laser beam pulse. The system also includes a laser control module that sequences temporal characteristics of the laser beam pulses. Additionally, the system includes a laser beam compensa...

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Bibliographic Details
Main Authors Stewart, Alan F, Koumvakalis, Andrea, Kay, Anthony J, Zeldin, Louis K
Format Patent
LanguageEnglish
Published 10.10.2023
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Summary:Described herein is a system for processing a workpiece that includes a plurality of lasers that each produces a laser beam pulse. The system also includes a laser control module that sequences temporal characteristics of the laser beam pulses. Additionally, the system includes a laser beam compensation module that shapes a near field intensity profile of at least one of the laser beam pulses and adjusts a path length of at least one of the laser beam pulses. The system also includes at least one laser beam position element that combines the laser beam pulses to produce a combined laser beam pulse at a surface of the workpiece.
Bibliography:Application Number: US201916294173