Silicon-containing underlayers
Methods of manufacturing electronic devices employing wet-strippable underlayer compositions comprising a condensate and/or hydrolyzate of a polymer comprising as polymerized units one or more first unsaturated monomers having a condensable silicon-containing moiety, wherein the condensable silicon-...
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Main Authors | , , , , , , |
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Format | Patent |
Language | English |
Published |
22.08.2023
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Subjects | |
Online Access | Get full text |
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Summary: | Methods of manufacturing electronic devices employing wet-strippable underlayer compositions comprising a condensate and/or hydrolyzate of a polymer comprising as polymerized units one or more first unsaturated monomers having a condensable silicon-containing moiety, wherein the condensable silicon-containing moiety is pendent to the polymer backbone, and one or more condensable silicon monomers are provided. |
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Bibliography: | Application Number: US202117370541 |