Method and system for driving and balancing actuators usable in MEMS-based cooling systems

A cooling system including a support structure and a cooling element are described. The cooling element has a central region, a first cantilevered arm, a second cantilevered arm, and a piezoelectric. The cooling element is supported by the support structure at the central region. The piezoelectric e...

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Bibliographic Details
Main Authors Sathyamurthy, Prabhu, Mukundan, Vikram, Yalamarthy, Ananth Saran, Ganti, Suryaprakash
Format Patent
LanguageEnglish
Published 04.07.2023
Subjects
BLASTING
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HEATING
LIGHTING
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
MECHANICAL ENGINEERING
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PRINTED CIRCUITS
PUMPS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
WEAPONS
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Summary:A cooling system including a support structure and a cooling element are described. The cooling element has a central region, a first cantilevered arm, a second cantilevered arm, and a piezoelectric. The cooling element is supported by the support structure at the central region. The piezoelectric extends across at least half of a length of the first cantilevered arm. The first and second cantilevered arms are configured to undergo vibrational motion when actuated to drive a fluid toward a heat-generating structure.
Bibliography:Application Number: US202117473810