Multi-layer, multi-material micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties

• Main Authors: Cohen, Adam L, Kumar, Ananda H, Kim, Kieun, Larsen, III, Rulon J, Wu, Ming Ting, Kim, Young, Lockard, Michael S, Smalley, Dennis R
• Format: Patent
• Language: English
• Published: 18.04.2023
• Subjects: LAYERED PRODUCTS; LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PERFORMING OPERATIONS; PHYSICS; TESTING; TRANSPORTING

Some embodiments of the invention are directed to electrochemical fabrication methods for forming structures or devices (e.g. microprobes for use in die level testing of semiconductor devices) from a core material and a shell or coating material that partially coats the surface of the structure. Other embodiments are directed to electrochemical fabrication methods for producing structures or devices (e.g. microprobes) from a core material and a shell or coating material that completely coats the surface of each layer from which the probe is formed including interlayer regions. Additional embodiments of the invention are directed to electrochemical fabrication methods for forming structures or devices (e.g. microprobes) from a core material and a shell or coating material wherein the coating material is located around each layer of the structure without locating the coating material in inter-layer regions.