Interposer substrate, MEMS device and corresponding manufacturing method
An interposer substrate, a MEMS device and a corresponding manufacturing method. The interposer substrate is equipped with a front side and a rear side, a cavity starting from the rear side, which extends up to a first depth, a through-opening and a sunken area situated between the cavity and the th...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
11.04.2023
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Subjects | |
Online Access | Get full text |
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Summary: | An interposer substrate, a MEMS device and a corresponding manufacturing method. The interposer substrate is equipped with a front side and a rear side, a cavity starting from the rear side, which extends up to a first depth, a through-opening and a sunken area situated between the cavity and the through-opening, which is sunken from the rear side up to a second depth in relation to the rear side, the first depth being greater than the second depth. |
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Bibliography: | Application Number: US201816765101 |