In-situ DC plasma for cleaning pedestal heater

Substrate supports, substrate support assemblies and methods of using an arc generated between a first electrode and a second electrode to clean a support surface. The first electrode comprises a plurality of first branches which are interdigitated with a plurality of branches of the second electrod...

Full description

Saved in:
Bibliographic Details
Main Authors Dan, Arkaprava, Baluja, Sanjeev, Tang, Wei V, Ulavi, Tejas
Format Patent
LanguageEnglish
Published 11.04.2023
Subjects
CLEANING
CLEANING IN GENERAL
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
TRANSPORTING
Online AccessGet full text

Cover

More Information
Summary:Substrate supports, substrate support assemblies and methods of using an arc generated between a first electrode and a second electrode to clean a support surface. The first electrode comprises a plurality of first branches which are interdigitated with a plurality of branches of the second electrode in a finger-joint like pattern creating a gap between the first electrode and the second electrode.
Bibliography:Application Number: US202217582100