Micromechanical light deflection device

A micromechanical light deflection device, including a micromechanical light deflection unit and a transparent cover for the micromechanical light deflection unit, the transparent cover including at least one passive beam shaping unit for a light beam.

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Bibliographic Details
Main Authors Stoppel, Klaus, Spiessberger, Stefan
Format Patent
LanguageEnglish
Published 27.12.2022
Subjects
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Summary:A micromechanical light deflection device, including a micromechanical light deflection unit and a transparent cover for the micromechanical light deflection unit, the transparent cover including at least one passive beam shaping unit for a light beam.
Bibliography:Application Number: US201816619591